제품소개

PRODUCT

대기 WTR

Atmosheric Wafer Transfer Robot has various models with combinations main body, arm&hand, common running axis. It is realized high-speed and flexible customizing with modularity.



  • Wafer Size

    ~300mm
  • Operating Range

    A or B-Axis 510mm, Θ-Axis 330deg, Z-Axis 300mm, R Axis 183deg
  • Speed

    A or B-Axis 1700mm/s, Θ-Axis 235~470deg/s, Z-Axis 150~500mm/s, R-Axis 300deg/s
  • Cleanliness

    Class 1(0.1㎛/cf)
  • Payload

    500g~3kg(Including the hand)
Model Arm Type Moving Axes Glass(Wafer) Size Z-Axis Stroke Payload Download
DWG STP JPG PDF
AR-S300H Single Arm 3 ~300mm 300mm 3kg (Including hand)

D

AR-W300H Dual Arm 4 ~300mm 300mm 3kg (Including hand)

D

AR-S300R Single Arm 3 ~300mm 300mm 500g (Including hand)

D