PRODUCT
Vacuum Wafer Transfer Robot is the shortest path with Θ axis's limitless rotation. It is realized high-speed, optimized configuration(Vacuum, N2 Environment) and Dry-bearing.
Wafer Size
~300mmOperating Range
A/B-Axis 545mm, Θ-Axis 330deg, Z-Axis 50mmSpeed
A/B-Axis 1000mm/s, Θ-Axis 216deg/s, Z-Axis 75mm/sCleanliness
Class 1(0.1㎛/cf)Payload
700g(Including the hand)